List of Tools in Nanoelectronics Processing Lab (NanoE bldg, 1st floor)
ICPRIE GaN Old (Biography of tool) |
- Operator : NETAJI SUVACHINTAK
- Faculty Incharge : Dipankar Saha
- System Owner : NETAJI SUVACHINTAK
- Cannot book with : ICPRIE GaN New
Ambios XP-2 Profilometer (Biography of tool)
- Faculty Incharge : Suddhasatta Mahapatra
- System Owner : Anjum Khan
- Cannot book with : Plasma asher
Rapid Thermal Processing Group IV (RTP Grp-IV) (Biography of tool) |
- Faculty Incharge : Udayan Ganguly
- System Owner : Shubham Patil (H)
Plasma asher (Biography of tool) |
- Operator : Shilpa Kharat, Minita Surwade (NH), Manisha Bansode
- Faculty Incharge : Dipankar Saha
- System Owner : Shilpa Kharat
- Cannot book with : Ambios XP-2 Profilometer
PLD I (Biography of tool) |
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Madhuri Mishra
ICPRIE GaN New (Biography of tool) |
- Faculty Incharge : Dipankar Saha
- Cannot book with : ICPRIE GaN Old
Ar-ion Milling (Biography of tool)
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Rachit Pandey (H)
- Cannot book with : Plasma Doping System
RIE-1C Plasma Etcher– Samco (Biography of tool)
- Operator : Hemant Kshirsagar, Shilpa Kharat, Minita Surwade (NH)
- Faculty Incharge : Saurabh Lodha
- System Owner : Shilpa Kharat
Plasma Doping System (Biography of tool) |
- Operator : Shilpa Kharat
- Faculty Incharge : Udayan Ganguly
- System Owner : Shubham Patil (H)
- Cannot book with : ICPRIE GaN Old, Ar-ion Milling
PLD IV (Biography of tool)
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Bhabani Prasad Sahu
AJA 6 Target E beam Evaporator (Biography of tool) |
- Operator : Anjum Khan, Shilpa Kharat
- Faculty Incharge : Apurba Laha
- System Owner : Shilpa Kharat
1.2 Lab wet bench (Biography of tool)
- Faculty Incharge : Dipankar Saha
- System Owner : Shilpa Kharat
Rapid Thermal Processing GaN (RTP GaN) (Biography of tool) |
- Faculty Incharge : Dipankar Saha
- System Owner : Kanchan Singh Rana
DektakXT Profilometer_1.1 Lab (Biography of tool) |
- Operator : Minita Surwade (NH), Shilpa Kharat, Anjum Khan
- Faculty Incharge : Saurabh Lodha
- System Owner : Pooja Sharma (H)