List of Tools in Nano Lab
Inductively coupled plasma CVD (ICPCVD) (Biography of tool) |
- Operator : Minita Surwade (NH)
- Faculty Incharge : Dipankar Saha
- System Owner : Hemant Kshirsagar, Minita Surwade (NH)
- Cannot book with : Rapid Thermal Processing_Nano lab_General
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Olympus Microscope_Nano Lab (Biography of tool) |
- Faculty Incharge : Dipankar Saha
- System Owner : Anjum Khan, Deepti Rukade
Rapid Thermal Processing_Nano lab_General (Biography of tool) |
- Operator : Pankajkumar Gound, Shahiroze Khetani
- Faculty Incharge : Dipankar Saha
- System Owner : Minita Surwade (NH)
- Cannot book with : Inductively coupled plasma CVD (ICPCVD), Rapid Thermal Processing_Nano lab_General
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Ultech Furnace Silicon Oxynitride (SiON) (Biography of tool) |
- Operator : Bhimraj Sable
- Faculty Incharge : Udayan Ganguly
- System Owner : Pradeep Nyaupane
Offline Tool
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Sputter ATC 2200 (Biography of tool) |
- Faculty Incharge : Udayan Ganguly
- System Owner : Abhishek Mallik, Aakash Deshpande
Sputter Orion (Biography of tool) |
- Operator : Hemant Kshirsagar, Minita Surwade (NH), Arpit Mishra
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Arpit Mishra, Akanksha Chouhan
ALD (Non LL) (Biography of tool) |
- Operator : Anjum Khan, Arpit Mishra
- Faculty Incharge : Saurabh Lodha
- System Owner : Prabhat Prajapati (H), Anjum Khan
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ALD LL (Biography of tool) |
- Operator : Anjum Khan
- Faculty Incharge : Saurabh Lodha
- System Owner : Prabhat Prajapati (H), Anjum Khan
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Nano Wet Bench (Biography of tool) |
- Faculty Incharge : Saurabh Lodha
- System Owner : Deepti Rukade
Woollam Ellipsometer (Biography of tool) |
- Operator : Shahiroze Khetani, Gopika Suresh, Minita Surwade (NH)
- Faculty Incharge : Sandip Mondal
- System Owner : Karuna Nyaupane, Atul Sachan