List of Tools in Nano Lab
Inductively coupled plasma CVD (ICPCVD) (Biography of tool)
- Operator : Minita Surwade (NH)
- Faculty Incharge : Dipankar Saha
- System Owner : Hemant Kshirsagar
- Cannot book with : Rapid Thermal Processing_Nano lab_General
 | Olympus Microscope_Nano Lab (Biography of tool) |
- Faculty Incharge : Dipankar Saha
- System Owner : Deepti Rukade
Rapid Thermal Processing_Nano lab_General (Biography of tool)
- Operator : Pankajkumar Gound, Shahiroze Khetani, Manisha Bansode
- Faculty Incharge : Dipankar Saha
- System Owner : Minita Surwade (NH)
- Cannot book with : Inductively coupled plasma CVD (ICPCVD)
| Sentech Ellipsometer (Biography of tool) |
- Operator : Shilpa Kharat, Pankajkumar Gound
- Faculty Incharge : Sandip Mondal
- System Owner : Shubham Patil (H)
Ultech Furnace Silicon Oxynitride (SiON) (Biography of tool)
- Operator : Bhimraj Sable
- Faculty Incharge : Udayan Ganguly
- System Owner : Pradeep Nyaupane
Ultech Furnace Low Temperature Oxide (LTO) (Biography of tool)
- Faculty Incharge : Saurabh Lodha
Ultech Furnace Silicon Nitride (SiN) (Biography of tool)
- Faculty Incharge : Udayan Ganguly
| Sputter ATC 2200 (Biography of tool) |
- Faculty Incharge : Udayan Ganguly
- System Owner : Paritosh Meihar
Sputter Orion (Biography of tool)
- Operator : Hemant Kshirsagar, Minita Surwade (NH), Arpit Mishra
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Akanksha Chouhan
ALD (Non LL) (Biography of tool)
- Operator : Anjum Khan
- Faculty Incharge : Saurabh Lodha
- System Owner : Anjum Khan
| ALD LL (Biography of tool) |
- Operator : Anjum Khan
- Faculty Incharge : Saurabh Lodha
- System Owner : Anjum Khan
| Nano Wet Bench (Biography of tool) |
- Faculty Incharge : Saurabh Lodha
- System Owner : Deepti Rukade