List of Tools in Micro1 Lab
 | 2 inch General purpose Forming gas(FGA)/ Ar /N2 annealing furnace (Biography of tool) |
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
2 inch Boron_Solid source Diffusion Furnace (Biography of tool)
- Operator : Shilpa Kharat, Arpit Mishra
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
- Cannot book with : 2 inch Dry oxidation Furnace
2 inch CMOS specific FGA furnace (Biography of tool)
- Operator : Shilpa Kharat, Arpit Mishra
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
2 inch Dry oxidation Furnace (Biography of tool)
- Operator : Arpit Mishra, Shilpa Kharat
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
- Cannot book with : 2 inch Boron_Solid source Diffusion Furnace
| 2 inch Wet oxidation Furnace (Biography of tool) |
- Operator : Arpit Mishra, Shilpa Kharat
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
- Cannot book with : 2 inch N2 Annealing Furnace
| 2 inch N2 Annealing Furnace (Biography of tool) |
- Operator : Shilpa Kharat
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
2 inch Phosphorous_Solid source Diffusion Furnace (Biography of tool)
- Faculty Incharge : Sandip Mondal
- System Owner : Pankajkumar Gound
| 4 target E-beam evaporator (Biography of tool) |
- Operator : Minita Surwade (NH), Arpit Mishra
- Faculty Incharge : Apurba Laha
- System Owner : Minita Surwade (NH)
| Dielectric - sputter System (Biography of tool) |
- Operator : Minita Surwade (NH), Shilpa Kharat, Shahiroze Khetani
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Arpit Mishra
| Thermal Evaporator - Al (Biography of tool) |
- Operator : Manisha Bansode, Minita Surwade (NH), Shilpa Kharat
- Faculty Incharge : Sandip Mondal
- System Owner : Shahiroze Khetani
Thermal Evaporator-Cr/Au (Biography of tool)
- Operator : Shilpa Kharat, Minita Surwade (NH), Manisha Bansode
- Faculty Incharge : Saurabh Lodha
- System Owner : Shahiroze Khetani
HRXRD (Biography of tool)
- Operator : Gopika Suresh, manshi chaturvedi, Anjum Khan
- Faculty Incharge : Apurba Laha
- System Owner : Swagata Bhunia
Tube Washer (Biography of tool)
- Operator : Shilpa Kharat, Pankajkumar Gound
- Faculty Incharge : Sandip Mondal
- System Owner : Minita Surwade (NH)
| Parylene CVD – SCS (Biography of tool) |
- Operator : Hemant Kshirsagar
- Faculty Incharge : Saurabh Lodha
- System Owner : Hemant Kshirsagar
| Wafer Dicer – ADT (Biography of tool) |
- Operator : Hemant Kshirsagar, Pankajkumar Gound
- Faculty Incharge : Ashwin Tulapurkar
- System Owner : Pankajkumar Gound
Gold Electroplating System (Biography of tool)
- Operator : Mahalaxmi Patil, Arpit Sahu, Gaurav Garg NH
- Faculty Incharge : Dipankar Saha